Math Problem Statement

Consider MOS device with following parameters: Acceptor Doping Concentration = 10^16 /cm^3 Oxide Thickness = 20 nm Calculate the body-effect coefficient for device  ( in V^0.5 )?

Solution

To calculate the body-effect coefficient γ\gamma for a MOS device, we use the following formula:

γ=2qεsNACox\gamma = \frac{\sqrt{2 q \varepsilon_s N_A}}{C_{ox}}

Where:

  • qq is the electron charge (1.6×1019C1.6 \times 10^{-19} \, C),
  • εs\varepsilon_s is the permittivity of silicon (11.7×8.854×1014F/cm\approx 11.7 \times 8.854 \times 10^{-14} \, F/cm),
  • NAN_A is the acceptor doping concentration (1016/cm310^{16} \, /cm^3),
  • CoxC_{ox} is the oxide capacitance per unit area, given by: Cox=εoxtoxC_{ox} = \frac{\varepsilon_{ox}}{t_{ox}} where εox\varepsilon_{ox} is the permittivity of silicon dioxide (3.9×8.854×1014F/cm3.9 \times 8.854 \times 10^{-14} \, F/cm), and toxt_{ox} is the oxide thickness (in cm).

Step 1: Calculate CoxC_{ox}

Given:

  • tox=20nm=20×107cmt_{ox} = 20 \, nm = 20 \times 10^{-7} \, cm,
  • εox=3.9×8.854×1014F/cm\varepsilon_{ox} = 3.9 \times 8.854 \times 10^{-14} \, F/cm,

Cox=3.9×8.854×101420×107F/cm2C_{ox} = \frac{3.9 \times 8.854 \times 10^{-14}}{20 \times 10^{-7}} \, F/cm^2

Step 2: Calculate γ\gamma

Now, substituting the values of qq, εs\varepsilon_s, and NAN_A, we calculate γ\gamma.

Let me calculate these values for you.The body-effect coefficient γ\gamma for the MOS device is approximately 0.333V0.50.333 \, V^{0.5}.

Would you like more details or have any questions?

Here are 5 related questions to explore further:

  1. What is the significance of the body-effect coefficient in MOS devices?
  2. How does the oxide thickness influence the body-effect coefficient?
  3. How does the doping concentration affect the threshold voltage?
  4. What role does the permittivity of materials play in MOS devices?
  5. How can we reduce the body effect in MOS transistors?

Tip: Increasing the oxide thickness decreases the oxide capacitance, which in turn increases the body-effect coefficient γ\gamma.

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Math Problem Analysis

Mathematical Concepts

Semiconductor Physics
MOSFET Operation
Capacitance

Formulas

γ = (sqrt(2 * q * ε_s * N_A)) / C_ox
C_ox = ε_ox / t_ox

Theorems

Body-Effect Coefficient Formula
Capacitance Per Unit Area Calculation

Suitable Grade Level

Undergraduate (Electrical Engineering/Physics)